Silicon Nitride Platform for Integrated Quantum Photonic Applications

SiN fabrication facility

The CNM-VLC is a Silicon Nitride photonics integration platform aiming at covering a wavelength range from the VIS to the long NIR (400-3700 nm wavelength range) for photonic integrated waveguide and circuit applications such as biophotonics, tele/datacom, quantum and sensing.

The photonic platform runs in the Integrated Micro- and Nanotechnology Clean Room hosted by the IMB-CNM (CSIC), parallel to a standard CMOS line. The infrastructure has 1500 square meter, with Class 100 (ISO5) and Class 1000 (ISO6) areas.

This technology is described in the following publication
[1] P. Muñoz, G. Micó, L. A. Bru, D. Pastor, D. Pérez, J. D. Doménech, J. Fernández, R. Baños, B. Gargallo, R. Alemany, A. M. Sánchez, J. M. Cirera, R. Mas, and C. Domínguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017). DOI: 10.3390/s17092088.

Silicon Nitride Platform for Integrated Quantum Photonic Applications

Multiproject wafers

The IMB-CNM Silicon Nitride platform has been developed in collaboration with the company VLC Photonics and it is offered through shared multi-project wafer runs or through dedicated wafer runs, which can also allow for some customizations. Photonic circuit design training can also be available through courses organized at VLC Photonics. Two standard die/cell sizes are available: M (5.0 x 5.0 mm) and L (10.0 x 5.0 mm). At least 20 copies of each die are delivered to the customers, to be used as proof of concept for research or industrial prototype

Silicon Nitride Platform for Integrated Quantum Photonic Applications

Process Design Kit (PDK)

A Process Design Kit (PDK) is available for the Synopsis Optodesigner software, containing all the technology related information to allow automatization of the design, simulation and layout of the available building blocks (multimode interference couplers, spirals, tapers, grating couplers, ring resonators, Mach-Zehnder interferometers, reflectors, etc.). All the process is documented in a design manual available through a Design Kit License Agreement (DKLA) with VLC Photonics, including also the guidelines to submit contributions to the platform.

More Information: http://www.imb-cnm.csic.es/index.php/en/clean-room/silicon-nitride-technology